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Tutorial 30 -- May, 2003
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OVERVIEW
This is the latest in a series of flip chip tutorials intended for new flip chip users, potential users, and those interested in specific flip chip processes and applications. Tutorial #1 presents the basics: an overview of what flip chip is and does, and how it is made. The other tutorials cover a wide range of topics in more detail. Concurrently, FlipChips Dot Com’s Technology Updates present industry experts describing the newest developments in their fields; our Literature and Photo pages give supplemental material.
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Measuring film thickness by spectral reflectance, Part 1 Filmetrics, Inc.
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Single
interface reflection occurs
whenever light crosses the interface between different materials.
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The fraction
of light that is reflected by an interface is determined by the
discontinuity in n and k. For light reflected off of a material
in air as shown by

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To
see how spectral reflectance can be used to measure optical constants,
consider the simple case of light reflected by a single nonabsorbing
material (k=0).

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n of the material can be determined from a measurement of R. In
real materials, n varies with wavelength (that is to say, real materials
exhibit dispersion), but since the reflectance is known at many
wavelengths, n at each of these wavelengths is also known, as shown
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n
and k Definitions
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Optical
constants (n and k) describe how light propagates through
a film. In simple terms, the electromagnetic field that
describes light traveling through a material at a fixed
time is given by

where
x is distance, lambda is the wavelength of light, and
n and k are the film's refractive index and extinction
coefficient, respectively. The refractive index is defined
as the ratio of the speed of light in a vacuum to the
speed of light in the material (n=c/v). The extinction
coefficient is a measure of how much light is absorbed
in the material.
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Multiple
Interfaces
Consider
now a thin film on top of another material. In this case both
the top and bottom of the film reflect light. The total amount
of reflected light is the sum of these two individual reflections.
Because of the wavelike nature of light, the reflections from
the two interfaces may add together either constructively (intensities
add) or destructively (intensities subtract), depending upon their
phase relationship.
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Their
phase relationship is determined by the difference in optical path
lengths of the two reflections, which in turn is determined by thickness
of the film, its optical constants, and the wavelength of the light.
Reflections are in-phase and therefore add constructively when the
light path is equal to one integral multiple of the wavelength of
light. For light perpendicularly incident on a transparent film,
this occurs when where
d is the thickness of the film and i is an integer (the factor of
two is due to the fact that the light passes through the film twice.)
Conversely, reflections are out of phase and add destructively when
the light path is one half of a wavelength different from the in-phase
condition, or when
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The qualitative
aspects of these reflections may be combined into a single equation:

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From this,
we can see that the reflectance of a thin film will vary periodically
with 1/wavelength, which is illustrated below. Also, thicker films
will exhibit a greater number of oscillations over a given wavelength
range, while thinner films will exhibit fewer oscillations, and
oftentimes only part of an oscillation, over the same range.
  
  
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For more information: The complete tutorial is available at www.Filmetrics.com , both on-line and as a downloadable file.
Filmetrics designs and manufactures thin-film measurement equipment capable of measuring silicon layers up to 160 microns thick. Great for flip-chip thinning and MEMS applications!
Filmetrics, Inc. 9335 Chesapeake Dr. San Diego CA 92123
Phone 858-573-9300 FAX 858-573-9400 Email info@filmetrics.com
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