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SMTA
Pan Pacific
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Copper generating process for next-generation core through-via filling. Stephen Kenny and Bernd Roelfs Atotech Deutschland GmbH, Germany |
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The manufacturing
process for substrate cores requires production of a planar surface which
is subsequently used as the starting point for the high-density build-up
layers. The core may be of varying thickness and is normally mechanically
drilled to produce the required through-via connections which are then
metalized and plugged with a thermally cured resin material. There is a
current tendency for reduced core thickness and this has implications for
yield, quality and ultimately for cost for product from the complete
process. The plugging process itself is relatively labor-intensive and
requires, as part of the sequence, a mechanical abrading or brushing
process after resin cure, which can cause problems of dimensional
stability, particularly for substrate cores less than 100µm thick. The
plugging resin itself has disadvantages in that it is a high-solid content
material, which has a different coefficient of thermal expansion (CTE) to
that of the surrounding material, including the copper metal in the via
and also to that of the dielectric of the core itself, typically a
glass-reinforced resin material. The disadvantages of the existing
plugging process can be eliminated by using pure copper to produce the
planar surface. For the next-generation process, copper is deposited into
the through vias as an integral part of the metallization process. The
drilled dielectric is made conductive and a thin layer of copper metal is
deposited to give a seed layer for the copper deposition process. The
through-vias are then completely filled by a modified electrolytic copper
deposition process, which can be accomplished in a single, fully automatic
continuous processing line. The use of pure copper has obvious
advantages in that its thermal characteristics are significantly better
than any type of resin material available. This fact can give more design
options to utilize the improved thermal transfer capability of vias in a
substrate than are currently available. The CTE of the copper-filled core
is dependant only on the copper metal and the glass-supported resin of the
drilled dielectric. The
copper structures in the subsequent layers may be positioned directly
above the copper-filled through-vias with no reliability implications. In
fact, the conductive path within the substrate may be designed to utilize
the more direct and parallel connection from one side of the substrate to
the other. |